Spin Rinse Dryer uSRD
Spin Rinse Dryer
CORPUS
Material: PP white or Stainless Steel
Door Material: PP white or PVC transparent
Wafer Size: up to 300mm
SIMPLE AND RELIABLE SETUP AND OPERATION
The MOT SRD suits for all batch applications. The sophisticated MOT μSRD software makes the operation extremely easy by using a Touch Panel; the SRD system offers 10 different built-in process programs according to different wafers. To further simplify operation for the user, a full range of settings can be pre-configured before the MOT μSRD is sent out.
